照度分布測定方法及び照度分布測定装置

Method and device for measuring illuminance distribution

Abstract

PROBLEM TO BE SOLVED: To efficiently measure two-dimensional distribution of illuminance, with space resolution of the order of 1 mm, on a light irradiated surface having an outer diameter or side length of about 10 mm to 50 mm by using a one- dimensional sensor array having a width of several mm without using a mask. SOLUTION: The quantity M of irradiation light is measured by the sensor array 2 having a width W while the sensor array 2 is moved at feed pitches P smaller than the width W of the sensor array 2 from a boundary of the irradiated surface. A light quantity computing part 11 of an arithmetic processing part 9 computes the quantity of light for a width equal to the feed pitch P at the position where the number of times of feeding is K from a difference between the quantity of light measured when the number of times of feeding is K and the quantity of light measured when the number of times of feeding is K-1 which overlaps with the quantity of light measured when the number of times of feeding is K.
(57)【要約】 【課題】外径又は1辺の長さが10mm〜50mm程度 の光照射面の照度分布を数mm幅の1次元センサアレイ を使い、マスクを使うことなく1mm程度の空間分解能 で2次元照度分布を効率よく測定する。 【解決手段】幅Wのセンサアレイ2を照射面の境界から センサアレイ2を幅Wより小さな送りピッチP毎に移動 しながらセンサアレイ2で照射されている光量Mを測定 する。演算処理部9の光量演算部11は送り回数Kで測 定した光量と送り回数(K−1)で測定した光量のうち K回で測定したセンサ位置とオーバラップする分の光量 との差から送り回数Kの位置における送りピッチP幅分 の光量を演算する。

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    JP-2011076087-AApril 14, 2011Xerox Corp, ゼロックス コーポレイションXerox CorporationHigh resolution linear image sensing using multi-row low resolution image sensor